| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Dana, Stephane S. | en_US |
| dc.contributor.author | Hawryluk, Andrew M. | en_US |
| dc.contributor.author | Kwasnick, Robert F. | en_US |
| dc.contributor.author | Bezdjian, Krikor A. | en_US |
| dc.contributor.author | Flanders, Dale C. | en_US |
| dc.contributor.author | Kappes, Manfred M. | en_US |
| dc.contributor.author | Staley, Ralph H. | en_US |
| dc.contributor.author | Kastner, Marc A. | en_US |
| dc.contributor.author | Griswold, Marsden P. | en_US |
| dc.contributor.author | Litster, James David | en_US |
| dc.contributor.author | Von Känel, Hans | en_US |
| dc.date.accessioned | 2010-07-15T21:01:23Z | |
| dc.date.available | 2010-07-15T21:01:23Z | |
| dc.date.issued | 1980-01 | en_US |
| dc.identifier | RLE_PR_122_XIX | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/56755 | |
| dc.description | Contains reports on seven research projects. | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ENG78-10436) | en_US |
| dc.description.sponsorship | M.I.T. Sloan Fund for Basic Research | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAG29-78-C-0020) | en_US |
| dc.description.sponsorship | U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) | en_US |
| dc.description.sponsorship | M.I.T. Cabot Fund | en_US |
| dc.description.sponsorship | Lawrence Livermore Laboratory (Subcontract 206-92-09) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant DMR78-23555) | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1980 | en_US |
| dc.relation.ispartof | General Physics | en_US |
| dc.relation.ispartof | Microstructure Fabrication | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 122 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Microstructure Fabrication | en_US |
| dc.subject.other | Creation of the Submicrometer Structures Laboratory | en_US |
| dc.subject.other | Development of Microstructure Fabrication Techniques | en_US |
| dc.subject.other | Graphoepitaxy | en_US |
| dc.subject.other | Attachment and Properties of Molecules on Submicrometer Structures | en_US |
| dc.subject.other | Electronic Transport in Quasi-One-Dimensional Submicrometer Structures in Silicon Inversion Layers | en_US |
| dc.subject.other | X-Ray Lenses | en_US |
| dc.subject.other | Diffraction Gratings | en_US |
| dc.subject.other | Submicrometer Structures | en_US |
| dc.subject.other | Liquid-Crystal Research | en_US |
| dc.title | Microstructure Fabrication | en_US |
| dc.type | Technical Report | en_US |
