| dc.contributor.author | Kim, Hyoung-June | en_US |
| dc.contributor.author | Palmer, Joyce E. | en_US |
| dc.contributor.author | Atwater, Harry A. | en_US |
| dc.contributor.author | Garrison, Stephen M. | en_US |
| dc.contributor.author | Quek, Hui Meng | en_US |
| dc.contributor.author | Ajuria, Sergio | en_US |
| dc.contributor.author | Floro, Jerrold A. | en_US |
| dc.contributor.author | Thompson, Carl V. | en_US |
| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Wong, Chee C. | en_US |
| dc.contributor.author | Im, James S. | en_US |
| dc.contributor.author | Tomita, Hisashi | en_US |
| dc.contributor.author | Smith, David A. | en_US |
| dc.contributor.author | Jiran, Eva | en_US |
| dc.contributor.author | Cammarata, Robert C. | en_US |
| dc.contributor.author | Clevenger, Lawrence A. | en_US |
| dc.contributor.author | Tu, King-Ning | en_US |
| dc.contributor.author | Maiorino, Cesar D. | en_US |
| dc.contributor.author | Longworth, Hai P. | en_US |
| dc.contributor.author | Cho, Jaeshin | en_US |
| dc.contributor.author | Kahn, H. | en_US |
| dc.contributor.author | Frost, Harold J. | en_US |
| dc.contributor.author | Dubner, Andrew D. | en_US |
| dc.contributor.author | Ro, Jaesang | en_US |
| dc.contributor.author | Melngailis, John | en_US |
| dc.date.accessioned | 2010-07-16T03:38:02Z | |
| dc.date.available | 2010-07-16T03:38:02Z | |
| dc.date.issued | 1987-01 | en_US |
| dc.identifier | RLE_PR_129_02 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/56995 | |
| dc.description | Contains reports on twelve research projects. | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS 85-06505) | en_US |
| dc.description.sponsorship | U.S. Air Force - Office of Scientific Research (Contract AFOSR-85-0154) | en_US |
| dc.description.sponsorship | Semiconductor Research Corporation (Contract 87-SP-080) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS 85-06565) | en_US |
| dc.description.sponsorship | International Business Machines, Inc. | en_US |
| dc.description.sponsorship | Sony International Business Machines, Inc. | en_US |
| dc.description.sponsorship | National Science Foundation (Grant DMR 84-18718) | en_US |
| dc.description.sponsorship | International Business Machines, Thomas J. Watson Research Center | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAALO3-86-K-0002) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant DMR 85-06030) | en_US |
| dc.description.sponsorship | Charles Stark Draper Laboratory (Contract DL-H-261827) | en_US |
| dc.description.sponsorship | Nippon Telegraph and Telephone, Inc. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1987 | en_US |
| dc.relation.ispartof | Kinetic Phenomena in Thin Film Electronic Materials | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 129 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Kinetic Phenomena in Thin Film Electronic Materials | en_US |
| dc.subject.other | Normal Grain Growth in Ultrathin (˂1000 Å) Films of Silicon | en_US |
| dc.subject.other | Normal Grain Growth in Ultrathin (˂1000 Å) Films of Germanium | en_US |
| dc.subject.other | Secondary Grain Growth in Ultrathin (˂1000 Å) Films of Silicon | en_US |
| dc.subject.other | Secondary Grain Growth in Ultrathin (˂1000 Å) Films of Germanium | en_US |
| dc.subject.other | Graphoepitaxy of Si | en_US |
| dc.subject.other | Graphoepitaxy of Ge | en_US |
| dc.subject.other | Graphoepitaxy of Model Materials | en_US |
| dc.subject.other | Epitaxy via Surface-Energy-Driven Grain Growth | en_US |
| dc.subject.other | Zone Melting Recrystallization of Silicon on Insulators | en_US |
| dc.subject.other | Properties of Grain Boundaries with Controlled Orientations in Thin Silicon Films | en_US |
| dc.subject.other | Properties of Grain Boundaries with Controlled Locations in Thin Silicon Films | en_US |
| dc.subject.other | Metastable Phase Formation in Lithographically Defined Particles of Semiconductors | en_US |
| dc.subject.other | Kinetics of Silicide Formation at Refractory Metal-Silicon Contacts | en_US |
| dc.subject.other | Grain Growth in Thin Films of Aluminum | en_US |
| dc.subject.other | Thin Metallic Interconnects | en_US |
| dc.subject.other | Narrow Metallic Interconnects | en_US |
| dc.subject.other | Electromigration at Aluminum-Silicon Contacts in Integrated Circuits | en_US |
| dc.subject.other | Computer Modeling of Microstructural Evolution in Thin Films | en_US |
| dc.subject.other | Focussed Ion Beam Induced Deposition | en_US |
| dc.title | Kinetic Phenomena in Thin Film Electronic Materials | en_US |
| dc.type | Technical Report | en_US |
