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Microstructural Evolution in Thin Films of Electronic Materials

dc.contributor.authorAjuria, Sergioen_US
dc.contributor.authorQuek, Hui Mengen_US
dc.contributor.authorThompson, Carl V., IIIen_US
dc.contributor.authorSmith, Henry I.en_US
dc.contributor.authorFrost, Harold J.en_US
dc.contributor.authorFloro, Jerrold A.en_US
dc.contributor.authorLiu, Yauchinen_US
dc.contributor.authorPalmer, Joyce E.en_US
dc.contributor.authorChong, Towen_US
dc.contributor.authorFonstad, Clifton G., Jr.en_US
dc.contributor.authorIm, James S.en_US
dc.contributor.authorChen, Chenson K.en_US
dc.contributor.authorJiran, Evaen_US
dc.contributor.authorClevenger, Lawrence A.en_US
dc.contributor.authorDeAvillez, Roberto R.en_US
dc.contributor.authorCammarata, Robert C.en_US
dc.contributor.authorJudas, Andreasen_US
dc.contributor.authorOlson, Johnen_US
dc.contributor.authorTu, King-Ningen_US
dc.contributor.authorGosele, Ulrichen_US
dc.contributor.authorCho, Jaeshinen_US
dc.contributor.authorKahn, Halen_US
dc.contributor.authorLongworth, Hai P.en_US
dc.contributor.authorRo, Jaesangen_US
dc.contributor.authorDubner, Andrew D.en_US
dc.contributor.authorMelngailis, Johnen_US
dc.date.accessioned2010-07-16T04:00:15Z
dc.date.available2010-07-16T04:00:15Z
dc.date.issued1988-01-01 to 1988-12-31en_US
dc.identifierRLE_PR_131_01_01s_02en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/57060
dc.descriptionContains reports on eight research projects.en_US
dc.description.sponsorshipNational Science Foundation (Grant ECS 85-06565)en_US
dc.description.sponsorshipU.S. Air Force - Office of Scientific Research (Contract AFOSR 85-0154)en_US
dc.description.sponsorshipNational Science Foundation-Materials Research Laboratory(Grant DMR 81-19285)en_US
dc.description.sponsorshipNational Science Foundation (Grant DMR 85-06030)en_US
dc.description.sponsorshipInternational Business Machines, Inc. Faculty Development Awarden_US
dc.description.sponsorshipMitsui Career Development Awarden_US
dc.description.sponsorshipInternational Business Machines, Inc.en_US
dc.description.sponsorshipSemiconductor Research Corporation (Contract 86-05-080)en_US
dc.description.sponsorshipJoint Services Electronics Program (Contract DAAG-29-83-K-0003)en_US
dc.description.sponsorshipCharles Stark Draper Laboratoryen_US
dc.description.sponsorshipDefense Advanced Research Projects Agency (DARPA)en_US
dc.description.sponsorshipNippon Telegraph and Telephone, Inc.en_US
dc.language.isoenen_US
dc.publisherResearch Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)en_US
dc.relation.ispartofMassachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1988en_US
dc.relation.ispartofSolid State Physics, Electronics And Opticsen_US
dc.relation.ispartofMaterials and Fabricationen_US
dc.relation.ispartofMicrostructural Evolution in Thin Films of Electronic Materialsen_US
dc.relation.ispartofseriesMassachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 131en_US
dc.rightsCopyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.en_US
dc.subject.otherMicrostructural Evolution in Thin Films of Electronic Materialsen_US
dc.subject.otherGrain Growth in Thin Filmsen_US
dc.subject.otherModelling of Microstructural Evolution in Thin Filmsen_US
dc.subject.otherPost-Nucleation Heteroepitaxy in Lattice Mismatched Systemsen_US
dc.subject.otherThin Film Zone Melting Recrystallization of Siliconen_US
dc.subject.otherCapillary Instabilities in Thin Solid Filmsen_US
dc.subject.otherKinetics of Thin Film Silicide Formationen_US
dc.subject.otherReliability and Microstructures of Interconnectsen_US
dc.subject.otherFocused Ion Beam Induced Depositionen_US
dc.titleMicrostructural Evolution in Thin Films of Electronic Materialsen_US
dc.typeTechnical Reporten_US


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