| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Lezec, Henri J. | en_US |
| dc.contributor.author | Musil, Christian R. | en_US |
| dc.contributor.author | Mahoney, Leonard J. | en_US |
| dc.contributor.author | Chu, Alex | en_US |
| dc.contributor.author | Chu, Larry | en_US |
| dc.contributor.author | Shepard, Mark I. | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Turner, George W. | en_US |
| dc.contributor.author | Woodhouse, John D. | en_US |
| dc.contributor.author | Liao, Kenneth S. | en_US |
| dc.contributor.author | Kazior, Thomas E. | en_US |
| dc.contributor.author | Mozzi, Robert | en_US |
| dc.contributor.author | Murguia, James E. | en_US |
| dc.contributor.author | Lattes, Analisa L. | en_US |
| dc.contributor.author | Munroe, Scott C. | en_US |
| dc.contributor.author | Huh, Jeung-Soo | en_US |
| dc.contributor.author | Papadopoulos, Haralabos C. | en_US |
| dc.contributor.author | Hartney, Mark A. | en_US |
| dc.contributor.author | Shaver, David C. | en_US |
| dc.contributor.author | Tao, Tao | en_US |
| dc.contributor.author | Wilkinson, William | en_US |
| dc.contributor.author | Dubner, Andrew D. | en_US |
| dc.contributor.author | Wagner, Alfred | en_US |
| dc.contributor.author | Thompson, Carl V. | en_US |
| dc.contributor.author | Ro, Jaesang | en_US |
| dc.date.accessioned | 2010-07-16T04:18:15Z | |
| dc.date.available | 2010-07-16T04:18:15Z | |
| dc.date.issued | 1990-01-01 to 1990-12-31 | en_US |
| dc.identifier | RLE_PR_133_01_01s_03 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57138 | |
| dc.description | Contains reports on thirteen research projects and a list of publications. | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency/U.S. Army Research Office Contract DAAL03-88-K-0108 | en_US |
| dc.description.sponsorship | National Science Foundation Grant ECS 89-21728 | en_US |
| dc.description.sponsorship | MIT Lincoln Laboratory Innovative Research Program | en_US |
| dc.description.sponsorship | SEMATECH Contract 90-MC-503 | en_US |
| dc.description.sponsorship | Micrion Contract M08774 | en_US |
| dc.description.sponsorship | U.S. Army Research Office Contract DAAL03-87-K-0126 | en_US |
| dc.description.sponsorship | IBM Corporation | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1990 | en_US |
| dc.relation.ispartof | Solid State Physics, Electronics and Optics | en_US |
| dc.relation.ispartof | Materials and Fabrication | en_US |
| dc.relation.ispartof | Focused Ion Beam Fabrication | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 133 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Focused Ion Beam Fabrication | en_US |
| dc.subject.other | Tunable Gunn Diode | en_US |
| dc.subject.other | Light Emission From Tunable Gunn Diodes | en_US |
| dc.subject.other | Effect of Dose Rate on Activation of Si Implanted in GaAs | en_US |
| dc.subject.other | Focused Ion Beam Implantation of GaAs MMICs | en_US |
| dc.subject.other | Focused Ion Beam Implantation of GaAs MESFETs | en_US |
| dc.subject.other | Doping Gradients in GaAs MESFETs | en_US |
| dc.subject.other | CMOS Transistors Fabricated by Focused Ion Beam Implantation | en_US |
| dc.subject.other | CMOS Transistors Fabricated by Focused Ion Beam Lithography | en_US |
| dc.subject.other | Charge Coupled Devices with Focused Ion Beam Implanted Doping Gradients in the Channel | en_US |
| dc.subject.other | Focused Ion Beam Lithography | en_US |
| dc.subject.other | Focused Ion Beam Exposure Combined With Silylation | en_US |
| dc.subject.other | Focused Ion Beam Induced Deposition of Platinum | en_US |
| dc.subject.other | Ion Induced Deposition of Gold, Results for the 2 to 10 keV Energy Range | en_US |
| dc.subject.other | Ion Induced Deposition of Gold, Models for the 2 to 10 keV Energy Range | en_US |
| dc.subject.other | Ion Induced Deposition of Gold, Results for the 50 to 100 keV Energy Range | en_US |
| dc.subject.other | Ion Induced Deposition of Gold, Models for the 50 to 100 keV Energy Range | en_US |
| dc.subject.other | Publications | en_US |
| dc.title | Focused Ion Beam Fabrication | en_US |
| dc.type | Technical Report | en_US |
