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dc.contributor.authorTroxel, Donald E.en_US
dc.contributor.authorFischer, Gregory T.en_US
dc.contributor.authorLohman, Thomas J.en_US
dc.contributor.authorBonvik, Asbjoern M.en_US
dc.contributor.authorNemec, Joseph E.en_US
dc.contributor.authorMoyne, William P.en_US
dc.contributor.authorKwon, Jimmy Y.en_US
dc.contributor.authorCarney, John C.en_US
dc.contributor.authorKao, James T.en_US
dc.contributor.authorMcIlrath, Michael B.en_US
dc.contributor.authorAntoniadis, Dimitri A.en_US
dc.contributor.authorBoning, Duane S.en_US
dc.contributor.authorRahman, Nadir E.en_US
dc.contributor.authorJacobs, Jarvis B.en_US
dc.contributor.authorJackson, Keith M.en_US
dc.contributor.authorWright, Chantal E.en_US
dc.contributor.authorChery, Yonalden_US
dc.contributor.authorWessling, Owenen_US
dc.date.accessioned2010-07-16T21:49:09Z
dc.date.available2010-07-16T21:49:09Z
dc.date.issued1995-01-01 to 1995-12-31en_US
dc.identifierRLE_PR_138_03_01s_02en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/57331
dc.descriptionContains research goals and objectives, reports on sixteen research projects and a list of publications.en_US
dc.description.sponsorshipDefense Advanced Research Projects Agency/U.S. Navy Contract N00174-93-K-0035en_US
dc.description.sponsorshipDefense Advanced Research Projects Agency/U.S. Army Contract DABT 63-95-C-0088en_US
dc.description.sponsorshipMultisponsored Projects Industrial/MIT Leaders for Manufacturing Programen_US
dc.language.isoenen_US
dc.publisherResearch Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)en_US
dc.relation.ispartofMassachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1995en_US
dc.relation.ispartofSystems And Signalsen_US
dc.relation.ispartofComputer-Aided Designen_US
dc.relation.ispartofComputer-Integrated Design and Manufacture of Integrated Circuitsen_US
dc.relation.ispartofseriesMassachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 138en_US
dc.rightsCopyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.en_US
dc.subject.otherComputer-Integrated Design of Integrated Circuitsen_US
dc.subject.otherComputer-Integrated Manufacture of Integrated Circuitsen_US
dc.subject.otherOperating High Variability Manufacturing Systemsen_US
dc.subject.otherDistributed Discrete Event Simulationen_US
dc.subject.otherQUAN: A Language for the Schedule Of Repetitive Manufacturing Systemsen_US
dc.subject.otherMicrosystems Factory Representationen_US
dc.subject.otherRun-by-Run: Interfacesen_US
dc.subject.otherRun-by-Run: Implementationen_US
dc.subject.otherRun-by-Run: Integrationen_US
dc.subject.otherRemote Fabrication of Integrated Circuitsen_US
dc.subject.otherMessage Passing Tools for Software Integrationen_US
dc.subject.otherRemote Microscope for Inspection of Integrated Circuitsen_US
dc.subject.otherSemiconductor Manufacturing Process Flow Representationen_US
dc.subject.otherComputer-Aided Technology Designen_US
dc.subject.otherModeling of Advanced Device Structuresen_US
dc.subject.otherSemiconductor Process Repositoryen_US
dc.subject.otherProcess Capabilities Databaseen_US
dc.subject.otherNational Infrastructure for Networked Designen_US
dc.subject.otherNational Infrastructure for Networked Prototypingen_US
dc.subject.otherMetal Reliabilityen_US
dc.subject.otherMetal Electromigrationen_US
dc.subject.otherRTFM: A Digital Design Lab Experten_US
dc.titleComputer-Integrated Design and Manufacture of Integrated Circuitsen_US
dc.typeTechnical Reporten_US


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