dc.contributor.author | Troxel, Donald E. | en_US |
dc.contributor.author | Fischer, Gregory T. | en_US |
dc.contributor.author | Lohman, Thomas J. | en_US |
dc.contributor.author | Bonvik, Asbjoern M. | en_US |
dc.contributor.author | Nemec, Joseph E. | en_US |
dc.contributor.author | Moyne, William P. | en_US |
dc.contributor.author | Kwon, Jimmy Y. | en_US |
dc.contributor.author | Carney, John C. | en_US |
dc.contributor.author | Kao, James T. | en_US |
dc.contributor.author | McIlrath, Michael B. | en_US |
dc.contributor.author | Antoniadis, Dimitri A. | en_US |
dc.contributor.author | Boning, Duane S. | en_US |
dc.contributor.author | Rahman, Nadir E. | en_US |
dc.contributor.author | Jacobs, Jarvis B. | en_US |
dc.contributor.author | Jackson, Keith M. | en_US |
dc.contributor.author | Wright, Chantal E. | en_US |
dc.contributor.author | Chery, Yonald | en_US |
dc.contributor.author | Wessling, Owen | en_US |
dc.date.accessioned | 2010-07-16T21:49:09Z | |
dc.date.available | 2010-07-16T21:49:09Z | |
dc.date.issued | 1995-01-01 to 1995-12-31 | en_US |
dc.identifier | RLE_PR_138_03_01s_02 | en_US |
dc.identifier.uri | http://hdl.handle.net/1721.1/57331 | |
dc.description | Contains research goals and objectives, reports on sixteen research projects and a list of publications. | en_US |
dc.description.sponsorship | Defense Advanced Research Projects Agency/U.S. Navy Contract N00174-93-K-0035 | en_US |
dc.description.sponsorship | Defense Advanced Research Projects Agency/U.S. Army Contract DABT 63-95-C-0088 | en_US |
dc.description.sponsorship | Multisponsored Projects Industrial/MIT Leaders for Manufacturing Program | en_US |
dc.language.iso | en | en_US |
dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1995 | en_US |
dc.relation.ispartof | Systems And Signals | en_US |
dc.relation.ispartof | Computer-Aided Design | en_US |
dc.relation.ispartof | Computer-Integrated Design and Manufacture of Integrated Circuits | en_US |
dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 138 | en_US |
dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
dc.subject.other | Computer-Integrated Design of Integrated Circuits | en_US |
dc.subject.other | Computer-Integrated Manufacture of Integrated Circuits | en_US |
dc.subject.other | Operating High Variability Manufacturing Systems | en_US |
dc.subject.other | Distributed Discrete Event Simulation | en_US |
dc.subject.other | QUAN: A Language for the Schedule Of Repetitive Manufacturing Systems | en_US |
dc.subject.other | Microsystems Factory Representation | en_US |
dc.subject.other | Run-by-Run: Interfaces | en_US |
dc.subject.other | Run-by-Run: Implementation | en_US |
dc.subject.other | Run-by-Run: Integration | en_US |
dc.subject.other | Remote Fabrication of Integrated Circuits | en_US |
dc.subject.other | Message Passing Tools for Software Integration | en_US |
dc.subject.other | Remote Microscope for Inspection of Integrated Circuits | en_US |
dc.subject.other | Semiconductor Manufacturing Process Flow Representation | en_US |
dc.subject.other | Computer-Aided Technology Design | en_US |
dc.subject.other | Modeling of Advanced Device Structures | en_US |
dc.subject.other | Semiconductor Process Repository | en_US |
dc.subject.other | Process Capabilities Database | en_US |
dc.subject.other | National Infrastructure for Networked Design | en_US |
dc.subject.other | National Infrastructure for Networked Prototyping | en_US |
dc.subject.other | Metal Reliability | en_US |
dc.subject.other | Metal Electromigration | en_US |
dc.subject.other | RTFM: A Digital Design Lab Expert | en_US |
dc.title | Computer-Integrated Design and Manufacture of Integrated Circuits | en_US |
dc.type | Technical Report | en_US |